|Pumping rate [l/min]:||15000|
|Treshold pressure [kPa]:||5×10-8|
|Vacuum pump:||Turbomolecular and diaphragm|
Consisting of the turbomolecular pump SST 304 and the three stage diaphragm pump MP 601 T.
Pumping speed of the turbomolecular pump for N2 250 l/sec. Pumping speed of the diaphragm pump 4.5 m3/h.